Abstract: In this paper, investigates the comb drive based microelectromechanical systems MEMS resonator device has coupled interaction between the electrical and mechanical systems of the transducer. The parametric resonator is the sense and it is electrostatic force driven in lateral direction. However, the mechanical domain was vibrates of modes an along with flexural folded beam. The Polyvinyl Alcohol (PVA) material based on the structures are analyzed for different number of combs with stiffness using Finite Element Methods (FEM) techniques. In addition this dynamic Multiphysics model is developed for the Arbitrary Lagrangian-Eulerian (ALE) formulation. Here, results shown the electrostatic actuation verses number of combs and displacement is related to change in the capacitance due to the comb fingers and calculated the capacitance in overlapping combs. This simulation work done by two dimensional (2D) IDC MEMS resonator structure using COMSOL Multiphysics 4.4 and also theoretical shown on the resonance frequency with the high quality factor.
Keywords: MEMS resonator, interdigitated comb-drive, electrostatic actuators, flexural beam and FEM.